New Sensor to Drastically Cut Water Usage During Chip Making Process
Wednesday, March 10, 2010 - 14:14
in Physics & Chemistry
Semiconductor Research Corporation (SRC), University of Arizona and Arizona State University researchers have shown a new, exclusive way to dramatically conserve the amount of water needed to manufacture semiconductors. Using a unique device called Electro-Chemical Residue Sensor (ECRS), it allows for clean, rinse and dry process optimization that helps make semiconductor facilities more efficient, sustainable and cost-effective.
