How to make e-beam lithography more practical as a mass-production technique

For 50 years, the transistors on computer chips have been getting smaller, and for 50 years, manufacturers have used the same technique -- photolithography — to make their chips. But the very wavelength of visible light limits the size of the transistors that photolithography can produce. If chipmakers are to keep shrinking chip features, they’ll probably need to turn to other manufacturing methods.

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