More precise method of nanopatterning

Thursday, August 4, 2011 - 06:00 in Physics & Chemistry

“A nanoimprint method has already been achieved in nanopatterning with a high resolution using negative type photoresist,” Kosei Ueno tells PhysOrg.com. Ueno is a scientist at Hokkaido University in Sapporo, Japan, and associated with PRESTO. “However, some problems remain with the negative type photoresist.”

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