Giant piezoelectric effect to improve MEMS devices

Researchers in the Department of Materials Science and Engineering and the Materials Research Institute at Penn State are part of a multidisciplinary team of researchers from universities and national laboratories across the U.S. who have fabricated piezoelectric thin films with record-setting properties. These engineered films have great potential for energy harvesting applications, as well as in micro-electro-mechanical-systems (MEMS), micro actuators, and sensors for a variety of miniaturized systems, such as ultrasound imaging, microfluidics, and mechanical sensing.

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