Leveling up scanning electron microscope measurements for chip manufacturing
Wednesday, May 31, 2023 - 15:23
in Physics & Chemistry
Researchers from the National Institute of Standards and Technology (NIST) and KLA Corporation, a provider of inspection and measurement systems for the semiconductor and related industries, have improved the accuracy of scanning electron microscope (SEM) measurements. Used for process control applications in semiconductor manufacturing, SEMs help ensure high-yield production of functional, high-performance chips.