Precise thickness measurement of soft materials by means of contact stylus instruments

In microsystems, metallic components are increasingly replaced by components made of inexpensive polymers. As polymers yield when they are subjected to pressure, the layer thicknesses cannot be measured with sufficient accuracy by means of conventional contact stylus instruments. But precision is of decisive importance in microsystem technology. Now, industrial enterprises which measure the thickness of soft polymer layers on hard substrates will be able to correct their measurement results by means of a formula.

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