JILA Frequency Comb System Detects Gas Impurities to Aid Semiconductor Manufacturing
Wednesday, August 4, 2010 - 09:07
in Physics & Chemistry
In a step toward solving a long-standing problem in semiconductor manufacturing, scientists at JILA have used their unique version of a 'fine-toothed comb' to detect minute traces of contaminant molecules in the arsine gas used to make a variety of photonics devices, where a mere trace of contaminants can damage or ruin tiny devices.