Frequency comb system detects gas impurities to aid semiconductor manufacturing
Wednesday, August 4, 2010 - 11:35
in Physics & Chemistry
In a step toward solving a long-standing problem in semiconductor manufacturing, scientists have used their unique version of a "fine-toothed comb" to detect minute traces of contaminant molecules in the arsine gas used to make a variety of photonics devices, where a mere trace of contaminants can damage or ruin tiny devices.