Terahertz Waves Are Effective Probes for IC Heat Barriers

(PhysOrg.com) -- By modifying a commonly used commercial infrared spectrometer to allow operation at long-wave terahertz frequencies, researchers at the National Institute of Standards and Technology discovered an efficient new approach to measure key structural properties of nanoscale metal-oxide films used in high-speed integrated circuits. Their technique, described in a recent paper,* could become an important quality-control tool to help monitor semiconductor manufacturing processes and evaluate new insulating materials.

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