Tokyo Electron and imec to accelerate directed self-assembly (DSA) development
Monday, October 8, 2012 - 07:00
in Physics & Chemistry
Imec and Tokyo Electron (TEL) announce that they will accelerate their Directed Self-Assembly (DSA) activities at imec's recent 300mm fab-compatible DSA process line. Over the past two years, both companies have been actively engaged in DSA development. Based on promising results achieved on imec's 300mm DSA process line, imec and TEL will now expand their focus to explore DSA as a cost-effective and manufacturing viable patterning technique for 2x and beyond technologies.