JILA frequency comb system detects gas impurities to aid semiconductor manufacturing
Thursday, August 5, 2010 - 05:56
in Physics & Chemistry
Purity of ingredients is a constant concern for the semiconductor industry, because a mere trace of contaminants can damage or ruin tiny devices. In a step toward solving a long-standing problem in semiconductor manufacturing, scientists at JILA and collaborators have used their unique version of a 'fine-toothed comb' to detect minute traces of contaminant molecules in the arsine gas used to make a variety of photonics devices...